Design of Film Bulk Acoustic Wave Sensor for Internet of Things (IoT) Applications

Abstract

The Internet of Things (IoT) is expanding quickly, which has increased demand for innovative sensing technologies that can provide real-time data for various applications. Film Bulk Acoustic Wave Resonators (FBARs) are miniature resonators that utilize the piezoelectric effect to create electrical signals using mechanical vibrations and vice versa. FBAR resonators have emerged as promising candidates for sensor applications in IoT due to their compact size, high sensitivity, and compatibility with microfabrication techniques. This paper presents design of FBAR sensor as gas and pressure sensor for IOT applications consisting of zinc oxide (ZnO) and Lithium niobate (LiNbO3) as piezoelectric film and Aluminum (Al) as top and bottom electrodes. The results show the superior performance of the proposed resonator. Based on the modeling results, the structure's resonance frequency is 12.02 and 10.36 GHz with a quality factor of 936.7 and 941.3 and an effective coupling coefficient of  18.35 and 18.27 % for ZnO and LiNbO3 respectively.